Avantier relies on the advanced Panasonic UA3P profilometer series to provide highly accurate metrology services. When combined with a sturdy granite base, this integrated system forms a resilient metrology solution suitable for use on the factory floor, consistently achieving a total uncertainty level as low as 0.1 micrometers.

Product Details:

  • Application: The Panasonic UA3P profilometer series is designed for measuring various precision components, including aspherical lenses, molds, semiconductor wafers, and other features that require nanometer-level accuracy. It can handle parts with dimensions ranging up to 200mm x 200mm.
  • Machine Models: Different models are available within the UA3P series to cater to various optical and high aspect ratio metrology needs.
  • Technology: The UA3P series utilizes AFM (Atomic Force Microscope) technology in its measurement process and combines it with the measurement range of a CMM (Coordinate Measuring Machine). The stylus uses atomic force probe technology, and the XYZ axis positioning relies on HeNe laser-based interferometry.
  • Durability: The system features a solid granite base, ensuring robustness and making it suitable for use on the factory floor while maintaining a high level of accuracy, with a total uncertainty of 0.1 micrometers (0.1um).

Key Features:

  • Versatile Measurement: The UA3P is capable of measuring aspherical lenses, free-form mirrors, and their molds, which are crucial components in digital consumer electronics (e.g., mobile phones, DSCs, DVDs, Blu-ray recorders), home security systems, optical communications, and vehicle technology.
  • Rapid Measurement: It offers ultra-accurate measurements, and the process takes only 3 minutes, making it efficient for various applications.
  • Automation: The system supports automatic NC (Numerical Control) program generation, streamlining the measurement process and reducing manual intervention.
  • Software Support: It comes with an extensive library of optional software, providing users with additional capabilities and flexibility in data analysis and processing.
  • User-Friendly Operation: The system is designed for easy operation, enabling users to provide rapid feedback to machining processes, making it suitable for real-time quality control.

Product Specifications

Model ID

UA3P-300

Outer Dimensions (W x D x H) mm

700 x 780 x 1,500

Mass of Main Body

700 kg (Others: 150 kg)

Measuring Range (X, Y, Z axes) mm

30x30x20

Measured Object Placement Area (X, Y, Z axes) mm

100x100x100

Measuring Probe

AFP

Resolution

0.3nm

Max. Inclination Angle for Top-Surface Measurement

75º

Measurement Accuracy with Top-Surface Probe

30° max.: ±0.05 µm (round trip)
45° max.: ±0.08 µm (round trip)
60° max.: ±0.15 µm (round trip)
70° max.: ±0.15 µm (back)
*When using the standard ruby stylus or ceramic stylus

Measurement Accuracy by Coordinate Axis (XY axis measurement accuracy)

100 mm max.: 0.05 µm (Repeatability 0.05 µm max. )
200 mm max.: 0.1 µm (Repeatability 0.05 µm max.)

Measurement Speed

0.005-5 mm/sec

Operating Environment Temperature

20-23°C (Variation ±1°C max.

Operating Environment Humidity

20-60% (Wind from air conditioners should not directly blow onto the equipment)

Operating Environment Vibration

Allowance 2.0 cm/s2 ( = 2.0 gal) Recommended 0.5 cm/s2

Air Pressure Source

0.5 MPa – 1.0 MPa Flow rate 150 NL/min

Standard Accessories

Standard ruby stylus, standard diamond stylus, AFP (Model 300: 1 pc., Models 4 and 5: 2 pcs. each), standard ball for calibration, printer

Max. Inclination Angle for Top-Surface Measurement

75º

Measurement Accuracy with Top-Surface Probe

30° max.: ±0.05 µm (round trip)
45° max.: ±0.08 µm (round trip)
60° max.: ±0.15 µm (round trip)
70° max.: ±0.15 µm (back)
*When using the standard ruby stylus or ceramic stylus

Measurement Accuracy by Coordinate Axis (XY axis measurement accuracy)

100 mm max.: 0.05 µm (Repeatability 0.05 µm max. )
200 mm max.: 0.1 µm (Repeatability 0.05 µm max.)

Measurement Speed

0.005-5 mm/sec

Operating Environment Temperature

20-23°C (Variation ±1°C max.)

Operating Environment Humidity

20-60% (Wind from air conditioners should not directly blow onto the equipment)

In summary, the Panasonic UA3P profilometer series emerges as an advanced metrology system meticulously crafted for precise measurements across diverse industries. Its primary emphasis revolves around accuracy, swiftness, and user-friendly operation.

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